High grade products for the electronics industry,High purity phosphoric acid

This is a high grade product with few impurities for the electronics industry that has been manufactured using a dry process.

EL phosphoric acid

Tank truck carrying EL phosphoric acid
(Tank truck carrying EL phosphoric acid)

Overview Higher purity than standard phosphoric acid. Used an etching agent for electronic materials.
Application Etching electronic materials
Shipping options Plastic container (25kg), Drum (320kg), Tank truck load (10t)

EL-S phosphoric acid

Packaging options for EL-S grade
(Packaging options for EL-S grade)

Overview This is our highest grade phosphoric acid, for which the level of particles that are fine contaminants has been reduced. Particles sticking to the surface of semiconductor wafers can cause defects in the semiconductor manufacturing process. By reducing impurities to the absolute minimum, this product can be used as an etching agent for semiconductors, which are sensitive to particles.
Application Etching electronic materials
Shipping options Plastic container (25kg,30kg), Drum (300kg), Tank truck load (10t)

Table of general standards for particles

General Standard
0.2µm/ml 200 or less
0.3µm/ml 70 or less
0.5µm/ml 20 or less