This is a high grade product with few impurities for the electronics
industry that has been manufactured using a dry process.
EL phosphoric acid
（Tank truck carrying EL phosphoric
acid）
| Overview |
Higher purity than standard phosphoric acid. Used an etching agent for electronic materials.
|
| Application |
Etching electronic materials |
| Shipping options |
Plastic container (25kg), Drum (320kg), Tank truck load (10t) |
EL-S phosphoric acid
（Packaging options for EL-S grade）
| Overview |
This is our highest grade phosphoric acid, for which the level of particles that are fine
contaminants has been reduced. Particles sticking to the surface of semiconductor wafers can
cause
defects in the semiconductor manufacturing process. By reducing impurities to the absolute
minimum,
this product can be used as an etching agent for semiconductors, which are sensitive to
particles.
|
| Application |
Etching electronic materials |
| Shipping options |
Plastic container (25kg,30kg), Drum (300kg), Tank truck load (10t) |
Table of general standards for particles
|
General Standard |
| 0.2µm/ml |
200 or less |
| 0.3µm/ml |
70 or less |
| 0.5µm/ml |
20 or less |
