EL phosphoric acid
（Tank truck carrying EL phosphoric acid）
| Overview | Higher purity than standard phosphoric acid. Used an etching agent for electronic materials. |
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| Application | Etching electronic materials |
| Shipping options | Plastic container (25kg), Drum (320kg), Tank truck load (10t) |
EL-S phosphoric acid
（Packaging options for EL-S grade）
| Overview | This is our highest grade phosphoric acid, for which the level of particles that are fine contaminants has been reduced. Particles sticking to the surface of semiconductor wafers can cause defects in the semiconductor manufacturing process. By reducing impurities to the absolute minimum, this product can be used as an etching agent for semiconductors, which are sensitive to particles. |
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| Application | Etching electronic materials |
| Shipping options | Plastic container (25kg,30kg), Drum (300kg), Tank truck load (10t) |
Table of general standards for particles
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General Standard |
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| 0.2µm/ml | 200 or less |
| 0.3µm/ml | 70 or less |
| 0.5µm/ml | 20 or less |
| Inquiries about high purity phosphoric acid | Click here to ask our sales team for more information about high purity phosphoric acid |
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